▪ Particle inspection on all area of reticle :

   - Pellicle, Pellicle Frame, Pattern, Backside

▪ Multi scanning with vertical and oblique optical system

▪ Inspection of various reticles with 1 recipe

   - No prior work for each mask needed

▪ Applicable to full automation
▪ 0.5um pinhole/particle detection in non-pattern area
▪ Optional function to distinguish particle position at
   top/bottom of pellicle
▪ Verifying review module included