▪ Verify Rework System(VRS) :
 - Camera : Color Verification 1M Area Camera
 - Scope : 5X, 10X, 20X, 50X, 100X, 150X

  

▪ Auto Focus
 - Focus Sensor : ADS (ATI Depth Sensor)
 - Repeatability : 1um@3σ

▪ Function
 - Auto Focus
 - Image Saving
 - CD Measurement
 - KLARF / MAP File Automation