- Polish, PSS, Epi, LED FAB process Monitoring & Inspection
- Inspection for LED Wafer Pre-alignment & LED Wafer Macro with Camera
- Using 8 Load Ports, Long Time Automatic Inspection and Sorting Function by Grade is Available.

▪ Inspection Item

  - Polish : Pit, Particle
  - PR : FM, Scratch, Particle
  - PSS : FM Residue, No Pattern, Particle
  - Epi : Pit, Pinhole, Press NG, Particle
  - FAB : Pad defect, Epitaxial Defect,
            Finger defect, ITO defect, Mesa Line, etc.