▪ LED Chip process Monitoring & Inspection
▪ Using Linescan camera, High Speed / High Precision inspection is available.
▪ Available for Large Chip, Vertical Type Chip and Pieces of Wafer.
▪ Inspection Item
   - Pad defect, Epitaxial Defect, Finger defect, ITO defect,
   - Mesa Line, Double chip, etc.