Wafer Macro Inspection System

  • Higher Resolution Optics
  • Color Macro Inspection
  • 4 Objective Lenses
  • NAC(Numerical Aperture Controller
  • Backside Inspection with IR
  • Color Backside Inspection
  • PBI(Post Bonding Inspection)
  • Enhanced 3D Optic
  • Edge Inspection
  • EBR Measurement
  • Full Area Inspection on Wafer